Compatible wafer size: Diameter 200mm / 150mm 1
Compatible wafer size: Thickness (standard) 300µm
Compatible wafer size: Thickness (thin wafer option) 300~100µm
Compatible carrier SEMI 25 (26) wafer carrier 2
Centering Non-contact, photoelectric sensors
Notch/orientation flat detection Non-contact, photoelectric sensors
Operation/display section Wafer slot buttons and interactive LCD interface
External dimensions (WxDxH) 535 x 626 x 350
Weight 50kg
Safety standards Electrical safety: CE mark compatible
SEMI: S2-0706, S8-0307, F47 compatible
Laser safety: FDA Class 1
Utilities Power supply: AC 100~240 V, 50/60 Hz, 1.5 A~0.7 A
Vacuum: -80kPa
Connection tube diameter: 6mm

Nikon NWL200 Wafer Loader

7536 West Murray Drive

Cicero, NY 13039

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