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Compatible wafer size: Diameter200mm / 150mm 1
Compatible wafer size: Thickness (standard)300µm
Compatible wafer size: Thickness (thin wafer option)300~100µm
Compatible carrierSEMI 25 (26) wafer carrier 2
CenteringNon-contact, photoelectric sensors
Notch/orientation flat detectionNon-contact, photoelectric sensors
Operation/display sectionWafer slot buttons and interactive LCD interface
External dimensions (WxDxH)535 x 626 x 350
Safety standardsElectrical safety: CE mark compatible
SEMI: S2-0706, S8-0307, F47 compatible
Laser safety: FDA Class 1
UtilitiesPower supply: AC 100~240 V, 50/60 Hz, 1.5 A~0.7 A
Vacuum: -80kPa
Connection tube diameter: 6mm

Nikon NWL200 Wafer Loader

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