| Compatible wafer size: Diameter | 200mm / 150mm 1 |
|---|---|
| Compatible wafer size: Thickness (standard) | 300µm |
| Compatible wafer size: Thickness (thin wafer option) | 300~100µm |
| Compatible carrier | SEMI 25 (26) wafer carrier 2 |
| Centering | Non-contact, photoelectric sensors |
| Notch/orientation flat detection | Non-contact, photoelectric sensors |
| Operation/display section | Wafer slot buttons and interactive LCD interface |
| External dimensions (WxDxH) | 535 x 626 x 350 |
| Weight | 50kg |
| Safety standards | Electrical safety: CE mark compatible SEMI: S2-0706, S8-0307, F47 compatible Laser safety: FDA Class 1 |
| Utilities | Power supply: AC 100~240 V, 50/60 Hz, 1.5 A~0.7 A Vacuum: -80kPa Connection tube diameter: 6mm |
Nikon NWL200 Wafer Loader
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